• Process and Characterization Equipments.
• Horizontal and Vertical Diffusions Systems, Oxidation, Atmospheric and LPCVD Process Systems.
• Photolithography, Mask Aligner Collimated UV Exposure Systems, Spin Coater, Developer, HDMS.
• Wet Process Stations, Spin Rinser Dryers, Spray Solvent Tool, Spray Acid Tool.
• Automated Defect Detection System, Optical Stylus System for BOW, WRAP Metrology, Non Contact Optical Surface Profiler, Vision Based CD Measurement System.
• PECVD, RIE, ICP-RIE System, ICP PECVD, ECR/ Microwave Systems, Deep Silicon Etch.
• HV/UHV DC/ RF Magnetron Sputtering Systems, E-Beam And Thermal Evaporation, Plasma , Rapid Thermal Annealing System.
• Spectroscopic Ellipsometer.
• Laser Pattern Generator.
• Hall Effect Measurement System, LED Tester, Probe Station Mannual, Semiautomatic and Fully Automatic.
• Instrumentation for Photovoltaic (Spectral Response/QE Measurement System, Small Area Solar Simulator, Solar Cell I-V Tester, I-V Curve Data Acquisition System, Solar Cell Sorter, Spectro Radiometer.
• UHV deposition & MBE System or Oxides and Nitrides.